Triple Glory Products
Products
| Categories | Title | Description |
|---|---|---|
| Heater | TEL Furnace Heater |
VMM-56-302EX with RCU , VMM-56-002 , VOS-56-003 with RCU VMM-56-201 with RCU VMM-56-306 with RCU VOS-56-101P with RCU Sell As Is |
| Photos | TEL ACT12 Parts |
Spare Parts List : TEL ACT12 / Main controller # 3 PHP Ejector Drive/Cooling Pneumatic Gas Panel PHP Hot plate LHP CPL ADH TCP YOKOGAWA DRIVER SR12000A02-2SN*1C/00S0542 TKD POWER SUPPLY BACKUP MSE343B, PANASONIC AC SERVO DRIVER (MSD021A1X) OVEN I/O BOARD (CPC-G227B01A-11) I/F BOARD #007/2981-600418-11 Temperature Controller Komatsu SMC THERMO-CON TCU / INR-244-248-216T Power Supply SMC THERMO-CON TCU / INR-244-248-230V Power Supply SMC THERMO-CON TCU / INR-244-248-230W Power Supply SMC THERMO-CON TCU / INR-244-248-242B Power Supply SHINWA T&H-ESA 8-T-01 TEL ACT12 / REX-B870-CS1 PCT SUS TANK BOTTLE RKC INSTRUMENT TEMPERATURE CONTROLLER, 24V DC, 0.24A MAX TEL ACT12/COAT CUP ASSY/2985-431327-11 CUP Robot * Interface module * T&H * AC Power Box |
| Pump / RF Rack /Chiller / Laser / IPC | Advanced Energy RF Generator |
Advanced Energy RF Generator Model :FRX600 A |
| Other | Yaskawa DUAL ARM WAFER TRANSFER ROBOT XU-RC400M-D03 | Yaskawa DUAL ARM WAFER TRANSFER ROBOT Model: XU-RC400M-D03 |
| Other | Yaskawa Wafer Pre-Aligner XU-ACP130-B11 |
Yaskawa Wafer Pre-Aligner Model: XU-ACP130-B11 |
| Other | BROOKS AUTOMATION FIXLOAD 6M, WAFER LOAD PORT |
BROOKS AUTOMATION FIXLOAD 6M, WAFER LOAD PORT Model : FIXLOAD 6M, WAFER LOAD PORT |
| Furnace / LPCVD | TEL Indy LPRO , D-Poly / BCD Poly , ALD NIT , ALD SIN |
TEL Indy LPRO : N2, O2, NO,N2O, ATCS (TCA) TEL D-Poly / BCD Poly : SiH4, PH3 ,O2/Ar , BCl3 , ClF3 TEL Indy ALD SIN/NIT : Nh3/DCS / HF/F2 |
| Furnace / LPCVD | TEL Indy+ / TEL Indy Plus / TEL Indy plus ALDOX , PEALOX , Ultra OX |
VMM-56-302EX with RCU , VMM-56-002 |
| Furnace / LPCVD | ALPHA-303i Oxide | ALPHA-303i Oxide , N2, O2 , HCl , Middle Temp , Pyro |
| Pump / RF Rack /Chiller / Laser / IPC | Chroma ESD Test System 58154 | Chroma ESD Test System 58154 |
| Pump / RF Rack /Chiller / Laser / IPC | NIKON 4S015-001-1 PCB BOARD NK862 | NIKON 4S015-001-1 PCB BOARD NK862 A-38 |
| Pump / RF Rack /Chiller / Laser / IPC | Moritex MHF-100L Light Source | Moritex MHF-100L Light Source |