Triple Glory Products
Products
| Categories | Title | Description |
|---|---|---|
| Pump / RF Rack /Chiller / Laser / IPC | Implant Disk | This disk is used. |
| Pump / RF Rack /Chiller / Laser / IPC | TEL Trias module Controller Unit | TOKYO ELECTRON TEL MODULE CONTROLLER TRIAS STP AC 250V/8A 039529-2 |
| Pump / RF Rack /Chiller / Laser / IPC | NIKON NVC6B-U CAMERA CONTROL UNIT | NIKON NVC6B-U CAMERA CONTROL UNIT |
| Pump / RF Rack /Chiller / Laser / IPC | Pump / RF Rack / Chiller |
Komatsu BCE-5051-A Chiller SMC Thermo-CON INR-244-633A, |
| Furnace / LPCVD | TEL Indy |
1. Process : Oxide , LPRO , Anneal , Poly , NIT , HK , Alloy , TEOS , TEL Indy Furnace. 2. Vintage：2007 or later 3. Wafer size：12 inch 4. Indy BL , Indy IL , Indy AL type ..... |
| Metrology | KLA Tencor UV 1280SE |
200mm Wafers, Measures Film Thickness, Refractive Index and Extinction Coefficient |
| Metrology | NIKON NWL860 WAFER LOADER |
Wafer inspection :Type : TMB 6″ / 8″ Auto Loader Nikon NWL860-TMB Nikon Eclipse L200 microscope + stage Refubish Complete |
| Pump / RF Rack /Chiller / Laser / IPC | RF Rack | 1.AD TEC Ax-1000LFIII |
| Pump / RF Rack /Chiller / Laser / IPC | Dry Pump |
1 .Ebara A07V Dry Pump 2. Ebara A30W Pump 3. Kashiyama SD60V II+KMB301T Dry Pump 4. Kashiyama SD609 Dry Pump 5. Kashiyama SDE2003B Dry Pump |
| Etch | Canon-ANELVA ILD-4100SR |
1. Oxide Dry Etch 2. Vintage : 1996 3. Wafer Size : 200 mm |
| Etch | TEL Etch TE-8401 |
1. Si Dry Etch 2. Vintage : 1992 3. Wafer Size : 200 mm |
| Metrology | Alcatel Adixen DGC 1001 Helium Leak Detector |
1. Helium Detector 2. Model: DGC1001 3. Maker : Alcatel / Adixen |